Influence of Radio-Frequecy Power on Structural and Electrical Properties of Sputtered Hafnium Dioxide Thin Films

Author： Wen-Ting Liu   Zheng-Tang Liu   Ting-Ting Tan   Feng Yan  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.27, Iss.2, 2010-02, pp. : 27703-27706

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Structural and electrical characterization of magnetron sputtered MoO3 thin films

By  

Journal of Physics: Conference Series , Vol. 208, Iss. 1, 2010-02 ,pp. : 793-798

IOP Publishing

Access to resources Recommend Favorite

Structural and optical properties studies of sputtered a-SiCN thin films

By  

Journal of Physics: Conference Series , Vol. 100, Iss. 8, 2008-03 ,pp. : 181-184

IOP Publishing

Access to resources Recommend Favorite

Influence of Substrate Bias on the Structural and Dielectric Properties of Magnetron-Sputtered BaxSr1-xTiO3 Thin Films

By Riekkinen Tommi   Saijets Jan   Kostamo Pasi   Sajavaara Timo   Van Dijken Sebastiaan  

Ferroelectrics, Vol. 392, Iss. 1, 2009-01 ,pp. : 3-12

Taylor & Francis Ltd

Access to resources Recommend Favorite

Influence of oxygen partial pressure on the structural, optical and electrical properties of Cu-doped NiO thin films

By Y Ashok Kumar Reddy   Reddy A Sivasankar   Reddy P Sreedhara  

Physica Scripta, Vol. 87, Iss. 1, 2013-01 ,pp. : 15801-15805

IOP Publishing

Access to resources Recommend Favorite

Influence of annealing temperature on the structural, optical and electrical properties of amorphous Zinc Sulfide thin films

By  

Journal of Physics: Conference Series , Vol. 326, Iss. 1, 2011-11 ,pp. : 149-152

IOP Publishing

Access to resources Recommend Favorite