Influence of N₂ Flux on InN Film Deposition on Sapphire (0001) Substrates by ECR-PEMOCVD

Author： Zhi-Feng Zhou Fu-Wen Qin Hai-Rong Zang Dong Zhang Wei-Ji Chen An-Bo Zhi Xing-Long Liu Bo Yu Xin Jiang

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.28, Iss.2, 2011-02, pp. : 28102-28105

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