Methods for determining and processing 3D errors and uncertainties for AFM data analysis

Author： Klapetek P   Nečas D   Campbellová A   Yacoot A   Koenders L  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.22, Iss.2, 2011-02, pp. : 25501-25510

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