Direct metal contact printing lithography for patterning sub-micrometer surface structures on a sapphire substrate

Author: Hsieh Yi-Ta   Lee Yung-Chun  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15001-15006

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