Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range

Author: Courbat J   Canonica M   Teyssieux D   Briand D   de Rooij N F  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15014-15024

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