KrF excimer laser micromachining of MEMS materials: characterization and applications

Author： Liu Kewei   NiCkolov Zhorro   Oh Jonghyun   Noh Hongseok Moses  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15012-15022

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