Fabrication of low pull-in voltage RF MEMS switches on glass substrate in recessed CPW configuration for V-band application

Author： Jaibir Sharma Nagendra Krishanapura Amitava DasGupta

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25001-25009

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