Author: Pétremand Y Affolderbach C Straessle R Pellaton M Briand D Mileti G de Rooij N F
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25013-25020
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Abstract