Author： Chuang Wan-Chun Wang Chang-Wen Chu Wen-Chang Chang Pei-Zen Hu Yuh-Chung
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25015-25021
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