Residual stress distribution and deflection analysis of very thin GaN membrane supported devices

Author: Cismaru A   Müller A   Konstantinidis G   Comanescu F   Purica M   Stefanescu A   Stavrinidis A   Dinescu A   Moldoveanu A  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15010-15016

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Abstract