One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces

Author： Susarrey-Arce A   Marín Á G   Schlautmann S   Lefferts L   Gardeniers J G E   van Houselt A  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25004-25009

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