Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

Author: Corbella C   Rubio-Roy M   Bertran E   Portal S   Pascual E   Polo M C   Andújar J L  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15006-15013

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