A large-volume microwave plasma source based on parallel rectangular waveguides at low pressures

Author： Zhang Qing   Zhang Guixin   Wang Shumin   Wang Liming  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15025-15028

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

MICROWAVE REFLEXION IN RECTANGULAR WAVEGUIDES BY HIGH PRESSURE R.F. PLASMA COLUMNS

By  

Le Journal de Physique Colloques, Vol. 40, Iss. C7, 1979-07 ,pp. : C7-827-C7-828

Edp Sciences

Access to resources Recommend Favorite

Resonance microwave volume plasma source

By Berezhetskaya N.   Kop’ev V.   Kossyi I.   Malykh N.   Misakyan M.   Taktakishvili M.   Temchin S.   Lee Young  

Plasma Physics Reports, Vol. 33, Iss. 7, 2007-07 ,pp. : 602-612

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber

By Takahashi Kazunori   Itoh Yuki   Fujiwara Tamiya  

Journal of Physics D: Applied Physics, Vol. 44, Iss. 1, 2011-01 ,pp. : 15204-15208

IOP Publishing

Access to resources Recommend Favorite

Large microwave plasma reactor based on surface waves

By  

Le Journal de Physique IV, Vol. 08, Iss. PR7, 1998-10 ,pp. : Pr7-187-Pr7-194

Edp Sciences

Access to resources Recommend Favorite

Coaxial microwave plasma source

By Gritsinin S.   Gushchin P.   Davydov A.   Kossyi I.   Kotelev M.  

Plasma Physics Reports, Vol. 37, Iss. 11, 2011-11 ,pp. : 965-971

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite