Author： Godyak V A
Publisher： IOP Publishing
ISSN： 0963-0252
Source： Plasma Sources Science and Technology, Vol.20, Iss.2, 2011-04, pp. : 25004-25010
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Abstract
A novel design of ICP with high coupling efficiency is presented. The efficiency augmentation is achieved using a thin window and an antenna coil enhanced by a ferromagnetic core. Considerable improvement of ICP electrical and plasma characteristics is demonstrated through experiments in ICP operated at 2 MHz in a wide range of argon gas pressures between 1 mTorr and 1 Torr, and discharge power between 15 W and 0.5 KW.
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