Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

Author： Bienholz S   Semmler E   Awakowicz P   Brunken H   Ludwig A  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.21, Iss.1, 2012-02, pp. : 15010-15017

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