Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

Author： Liu Jia Zhang Quan-Zhi Liu Yong-Xin Gao Fei Wang You-Nian

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.46, Iss.23, 2013-06, pp. : 235202-235209

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