Effects of Thin Film Layers on Actuating Performance of Microheaters

Author： Soo Kim Min Weon Lee Bang Soo Lee Yong Sik Shim Dong Kuk Keon

Publisher： Society for Imaging Science and Technology

ISSN： 1943-3522

Source： Journal of Imaging Science and Technology, Vol.51, Iss.5, 2007-09, pp. : 445-451

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