Author: Yan M. Goedheer W.
Publisher: Springer Publishing Company
ISSN: 0011-4626
Source: Czechoslovak Journal of Physics, Vol.48, Iss.2, 1998-02, pp. : 257-262
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Catalytic decomposition of SiH 4 on a hot filament
By Tange S. Inoue K. Tonokura K. Koshi M.
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Polycrystalline silicon film growth in a SiF 4 /SiH 4 /H 2 plasma
By Lee B. Quinn L.J. Baine P.T. Mitchell S.J.N. Armstrong B.M. Gamble H.S.
Thin Solid Films, Vol. 337, Iss. 1, 1999-01 ,pp. :