A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H2 discharges

Author: Yan M.   Goedheer W.  

Publisher: Springer Publishing Company

ISSN: 0011-4626

Source: Czechoslovak Journal of Physics, Vol.48, Iss.2, 1998-02, pp. : 257-262

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Abstract