Specific Nature of Formation of Uncertainty in Measurements of the Geometric Parameters of Surface Texture by Means of Methods of High-Resolution Interferometry

Author： Zolotarevskii S.   Kononogov S.   Lysenko V.   Levin G.   Lyaskovskii V.   Gusev A.   Golubev S.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.56, Iss.9, 2013-12, pp. : 999-1005

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