A low cross-sensitivity dual-axis silicon-on-insulator accelerometer integrated as a system in package with digital output

Author： Alfaifi Ahmad Allidina Karim Nabki Frederic El-Gamal Mourad

Publisher： Springer Publishing Company

ISSN： 0925-1030

Source： Analog Integrated Circuits and Signal Processing, Vol.77, Iss.3, 2013-12, pp. : 345-354

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