Microstructure and secular instability of the (Ti1 - x,Alx)N films prepared by ion-beam-assisted-deposition

Author: Suzuki T.   Makino Y.   Samandi M.   Miyake S.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.35, Iss.16, 2000-08, pp. : 4193-4199

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