Chemical vapor deposition of carbon from methane at various pressures, partial pressures and substrate surface area/reactor volume ratios

Author: Zhang W.G.   Hüttinger K.J.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.36, Iss.14, 2001-07, pp. : 3503-3510

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content