Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

Author: Shariatmadar Tehrani Fatemeh  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.24, Iss.4, 2013-04, pp. : 1361-1368

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