Optimizing hardness of CNx thin films by dc magnetron sputtering and a statistical approach

Author： Akiyama M. Alexandrou I. Chhowalla M. Amaratunga G.A.J.

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.36, Iss.22, 2001-11, pp. : 5397-5401

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