Hardness of titanium carbide films deposited on silicon by pulsed laser ablation

Author: de Maria G.   Ferro D.   D'Alessio L.   Teghil R.   Barinov S.M.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.36, Iss.4, 2001-02, pp. : 929-935

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