A study on the microstructure and property development of d.c. magnetron cosputtered ternary titanium aluminium nitride coatings Part III effect of substrate bias voltage and temperature

Author: Wuhrer R.   Yeung W.Y.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.37, Iss.10, 2002-05, pp. : 1993-2004

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