Chemical vapour deposition of microdrill cutting edges for micro- and nanotechnology applications

Author： Sein H.   Ahmed W.   Hassan I.U.   Ali N.   Gracio J.J.   Jackson M.J.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.37, Iss.23, 2002-12, pp. : 5057-5063

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