Effects of interface structures on cracking in AlN(112̄0)/α-Al2O3(11̄02) epitaxial films

Author: Kaigawa K.   Shibata T.   Nakamura Y.   Asai K.   Tanaka M.   Sakai H.   Tsurumi T.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.37, Iss.6, 2002-03, pp. : 1155-1163

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Abstract