On the evolution of surface morphology of polysilicon MEMS structures during fatigue

By Shrotriya P.   Allameh S.M.   Soboyejo W.O.  

Mechanics of Materials, Vol. 36, Iss. 1, 2004-01 ,pp. : 35-44

Elsevier

Access to resources Recommend Favorite

Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading

By Soboyejo A. B. O.   Bhalerao K. D.   Soboyejo W. O.  

Journal of Materials Science, Vol. 38, Iss. 20, 2003-10 ,pp. : 4163-4167

Springer Publishing Company

Access to resources Recommend Favorite

Thermal cycling response of layered gold/polysilicon MEMS structures

By Gall K.   Dunn M.L.   Zhang Y.   Corff B.A.  

Mechanics of Materials, Vol. 36, Iss. 1, 2004-01 ,pp. : 45-55

Elsevier

Access to resources Recommend Favorite

Fatigue testing of polysilicon--a review

By Sharpe W.N.   Bagdahn J.  

Mechanics of Materials, Vol. 36, Iss. 1, 2004-01 ,pp. : 3-11

Elsevier

Access to resources Recommend Favorite

Surface topography evolution and fatigue fracture of polysilicon

By Allameh S. M.   Shrotriya P.   Butterwick A.   Brown S.   Yao Nan   Soboyejo W.  

Journal of Materials Science, Vol. 38, Iss. 20, 2003-10 ,pp. : 4145-4155

Springer Publishing Company

Access to resources Recommend Favorite