Surface topography evolution and fatigue fracture of polysilicon

Author: Allameh S. M.   Shrotriya P.   Butterwick A.   Brown S.   Yao Nan   Soboyejo W.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.38, Iss.20, 2003-10, pp. : 4145-4155

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Abstract