Optimal design of multilayered polysilicon films for prescribed curvature

Author： Ni A.   Sherman D.   Ballarini R.   Kahn H.   Mi B.   Phillips S. M.   Heuer A. H.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.38, Iss.20, 2003-10, pp. : 4169-4173

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