Application of N2/Ar inductively coupled plasma → the photoresist ashing for low-k dielectrics

Author: Kim Hyoun   Myung Ju   Kim Nam   Yoo Chung-Gon   Suh Kee   Kim Sung   Choi Dae-Kyu   Chung Chin-Wook   Kang Chang-Jin   Park Wan   Park Se-Geun   Lee Jae-Gab  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.40, Iss.13, 2005-07, pp. : 3543-3544

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