Properties and characterization of low-temperature amorphous PECVD silicon nitride films for solar cell passivation

Author: Ali S.   Gharghi M.   Sivoththaman S.   Zeaiter K.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.40, Iss.6, 2005-03, pp. : 1469-1473

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