Properties of Ta–Mo alloy gate electrode for n-MOSFET

Author: Lee Chung   Kim Jae   Hong Shin   Zhong Huicai   Chen Bei   Misra Veena  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.40, Iss.9-10, 2005-05, pp. : 2693-2695

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Abstract