Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams

Author： Tanaka M. Chu F. Shimojo M. Takeguchi M. Mitsuishi K. Furuya K.

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.41, Iss.9, 2006-05, pp. : 2667-2671

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