Growth and characterization of high resistivity c-axis oriented ZnO films on different substrates by RF magnetron sputtering for MEMS applications

Author: Singh Ravindra   Kumar Mahesh   Chandra Sudhir  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.42, Iss.12, 2007-06, pp. : 4675-4683

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