Condensation of Argon, Monosilane and Their Mixtures in a Pulse Free Jet

Author: Korobeishchikov N.   Zarvin A.   Madirbaev V.   Sharafutdinov R.  

Publisher: Springer Publishing Company

ISSN: 0272-4324

Source: Plasma Chemistry and Plasma Processing, Vol.25, Iss.4, 2005-08, pp. : 319-349

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Abstract