Effect of Ion Energy on Structure and Composition of Cathodic Arc Deposited Alumina Thin Films

Author: Rosén Johanna   Mráz Stanislav   Kreissig Ulrich   Music Denis   Schneider Jochen  

Publisher: Springer Publishing Company

ISSN: 0272-4324

Source: Plasma Chemistry and Plasma Processing, Vol.25, Iss.4, 2005-08, pp. : 303-317

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