Pulsed-Spray Radiofrequency Plasma Enhanced Chemical Vapor Deposition of CuInS2 Thin Films

Author: Rodriguez Rene   Pulsipher Daniel   Lau Lisa   Shurdha Endrit   Pak Joshua   Jin Michael   Banger Kublinder   Hepp Aloysius  

Publisher: Springer Publishing Company

ISSN: 0272-4324

Source: Plasma Chemistry and Plasma Processing, Vol.26, Iss.2, 2006-04, pp. : 137-148

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