Author: Bubnov A. Burova E. Grinevich V. Rybkin V. Kim J.-K. Choi H.-S.
Publisher: Springer Publishing Company
ISSN: 0272-4324
Source: Plasma Chemistry and Plasma Processing, Vol.27, Iss.2, 2007-04, pp. : 177-187
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
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