Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Author： Ye Rubin   Murphy Anthony   Ishigaki Takamasa  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.27, Iss.2, 2007-04, pp. : 189-204

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