An Analysis of Low Frequency Discharge in a CH3SiCl3-Ar-H2 Mixture by Optical Emission Spectroscopy and Actinometry

Author: Kułakowska-Pawlak Barbara   Jamróz Piotr  

Publisher: Springer Publishing Company

ISSN: 0272-4324

Source: Plasma Chemistry and Plasma Processing, Vol.30, Iss.5, 2010-10, pp. : 641-661

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