Distortion of the Profile of Surface Relief Elements of Single-Crystal Silicon Caused by Contamination in a Low-Voltage Scanning Electron Microscope

Author： Gavrilenko V.   Kuzin A.   Mityukhlyaev V.   Rakov A.   Todua P.   Filippov M.   Sharonov V.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.56, Iss.3, 2013-06, pp. : 235-239

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