Hybrid Inorganic-Organic Sol–Gel Coatings in the SiO₂-TiO₂ System

By Zaharescu Maria   Crisan Maria   Predoana Luminita   Gartner Mariuca   Cristea Dana   Degeratu Stefania   Manea Elena  

Journal of Sol-Gel Science and Technology, Vol. 32, Iss. 1-3, 2004-12 ,pp. : 173-177

Springer Publishing Company

Access to resources Recommend Favorite

A comparative study of O2/SiH4 and N2O/SiH4 mixtures for SiO2 deposition in a microwave afterglow

By  

Le Journal de Physique IV, Vol. 03, Iss. C3, 1993-08 ,pp. : C3-241-C3-246

Edp Sciences

Access to resources Recommend Favorite

DOWNSTREAM MICROWAVE PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION OF SiO2 USING O2/SiH4 AND N2O/SiH4 MIXTURES

By  

Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. : C2-421-C2-428

Edp Sciences

Access to resources Recommend Favorite

LPCVD SiO2 Layers Prepared from SiH4 and O2 at 450 °C in a Rapid Thermal Processing Reactor

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-1005-C5-1011

Edp Sciences

Access to resources Recommend Favorite

Deposition of SiO2 in a SiH4/O2 inductively coupled plasma

By  

Journal of Physics: Conference Series , Vol. 518, Iss. 1, 2014-06 ,pp. : 52-57

IOP Publishing

Access to resources Recommend Favorite