The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Author: Moon Yeon-Keon   Kim Se-Hyun   Park Jong-Wan  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.17, Iss.12, 2006-12, pp. : 973-977

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