Diamond nanopatterns fabricated by room-temperature nanoimprinting technology with diamond molds using polysiloxane

Author: Kiyohara Shuji   Fujiwara Makoto   Matsubayashi Fumio   Mori Katsumi  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.17, Iss.3, 2006-03, pp. : 199-203

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Abstract