Aluminum doped ZnO by reactive sputtering of coaxial Zn and Al metallic targets

Author: Santana-Aranda M.   Armenta-Estrada A.   Mendoza-Barrera C.   Michel C.   Chávez-Chávez A.   Jiménez-Sandoval S.   Meléndez-Lira M.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.18, Iss.6, 2007-06, pp. : 611-614

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Abstract