Effect of sputtering power on microstructure of dielectric ceramic thin films by RF magnetron sputtering method using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 as target

Author: Shi Feng  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.22, Iss.9, 2011-09, pp. : 1290-1296

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