Preparation and Lithographic Performance of Novel Copolymers Having Acid Labile Pendant Alicyclic Ether Moieties

Author: Liu J-H.   Shih J-C.  

Publisher: Springer Publishing Company

ISSN: 1022-9760

Source: Journal of Polymer Research, Vol.8, Iss.2, 2001-06, pp. : 143-150

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