Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor

Author: Borodulya V.   Vinogradov L.   Rabinovich O.   Akulich A.  

Publisher: Springer Publishing Company

ISSN: 1062-0125

Source: Journal of Engineering Physics and Thermophysics, Vol.78, Iss.1, 2005-01, pp. : 47-53

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Abstract